We are working with Sentaurus TCAD to simulate the electrical characteristics of the MOS devices. In case nano-particle embedded MOS system for memory cell application the C-V loops are experimentally measured by accumulation (A) to inversion (I) and I to A. The area of the loop indicate the performance on charge storing capacity of the devices. But in case of TCAD simulation we are unable to simulate the C-V loop. So, How to simulate C-V hysteresis loop for MOS capacitor with TCAD?