1. Indeed, I want the method for analyzing and calculating the crystalline fraction for a microcrystalline silicon film from a diffraction spectrum of x-rays.
2. What is the position of the peak 110 in the case of microcrystalline silicon ?
I can provide you a standard spectrum of Si and XRD data - .dat & .pdf file respectively. Regarding {110}, it's discussed in an article attached (sun1997.pdf). It's thought that {220} (located at 2theta = ca. 47.3) is the second-order {110} reflection.
Michael thank you for the interest in my question. And thank you for the article and the data
Actually, my problem is divided into two parts, the first is that I want the method to determine the crystalline fraction present in my films. The second part, I made a measurement with XRD, and I got the spectrum in attached. two peaks that I have never met in the literature for microcrystalline silicon, the first around ~ 22 °, and the third around ~ 34 °. is that these two peaks have an original or is a measurement error.
Thank you in advance.
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