SRIM code gives you details about damage caused by primary ions.

www.srim.org

Yes, c-rbs would be better to measure damage to the crystal structure. Although only an indirect measure, measuring the mixing between layers or interfaces provides an indication of damaging by showing degree of mixing induced between adjacent layers. First fit an unirradiated sample, while paying particular attention to fitting layer interface profiles by varying the detector resolution. Then, in irradiated samples, keep the same detector resolution and introduce a profile defining a mixed region between layers. The thickness and shape of the concentration gradient in that mixed region gives a measure of mixing which could be used as a proxy for radiation damage.