If I want to create oxygen vacancies in metal oxide using some low energy light ions I need to know the exact displacement energy of oxygen and metal. So how to know the exact value?

Et = 4m1m2/(m1+m2)2 Eion

From this formula I know the maximum transfer energy to each element and I could know from literature the heat of formation for a compound but how to know the exact value of displacement energy. In TRIM a little change in Ed will change the result.

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