How can I selectively dry etch Ti on a polymer substrate?

25 February 2021 1 6K Report

I am trying to avoid wet etching as the polymer is quite sensitive. I want to etch Ti, but avoid etching the polymer and gold. Ideally the temperature will be kept below 80 °C.

Philippe Bezard

Hello, it really depends on the polymer you are trying to preserve but I recommend you try a fluorocarbon (CHxFy) + Cl2 plasma chemistry.

Titanium is known to be etched faster in mixes of fluorine and chlorine than with just one of them.

In terms of sources (CCP or ICP), as mentioned, it really depends on which polymer you are trying to protect.

I hope it helps!

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