We are growing CNT by CVD using ammonia, ethylene and a catalyst (Fe). Right now we are depositing Fe like 20-30nm on top of an oxide wafer. The flow rate of C2H4 is 30sscm and ammonia 200sscm, but we are getting a height of CNT 15um at pressure 30-55. Can anyone please tell me which parameter is dominant to get a higher height, and what parameters should we change?

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