Many thanks Joseph. Really useful information. I would think 10nm FWHM is acceptable.

The second harmonic generation from a 940nm diode, is interesting, has it been commercialized? can purchase on it?

Isn't below 180nm is considered vacuum UV? Does it operate only in vacuum?

Thanks again.

May I know what kind of filter I should use to filter out the rest of the spectrum in order to get around 10nm FWHM of 235nm UV-C?

Dear Boon Han Lim, for producing of 235 and 180 nm light it is possible to use third and fourth harmonic of Ti:saphirre laser accordingly.

Thanks, Yury, do  you know the specific url or website address?

http://link.springer.com/article/10.1007%2Fs00340-011-4370-1#page-1

http://www.nat.vu.nl/~switte/papers/Joop_THG_external_cavities_Appl_Phys_Lett2003.pdf

http://solarlaser.com/en/products/tuneable-laser-sources/narrow-linewidth-ti-sapphire-laser-model-lx329/

Unfortunately 180 nm only in scientific publications not as ready system. The Solar Laser  can possible adjust system for 180 nm output.

Many thanks  for the information, Yury.

Good! Thanks Joeseph.

normally excimer laser can produced such uv light, Currently the excimer can produce, 151 nm, 193 nm  with ArF excimer laser. with Krf excimer laser it can produce 248 nm, in UTM at Laser center we have 193  nm and 248 nm excimer laser. You can come  to UTM and we discuss further for the application

Can provide 180nm and 235nm as well, Dr. Noriah? Thanks