Dear Dr. Abdelkader Bouazza ,

I suggest you to have a look at the following, interesting papers:

-The Effect of Sputtering Parameters on the Film Properties of Molybdenum Back Contact for CIGS Solar Cells

Peng-cheng Huang, Chia-ho Huang, Mao-yong Lin, Chia-ying Chou, Chun-yao Hsu, and Chin-guo Kuo

International Journal of Photoenergy, Article ID 390824 (2013)

Available at: https://www.hindawi.com/journals/ijp/2013/390824/

- Influence of sputtering parameters on microstructure and morphology of TiO 2 thin films

Seon-Hwa Kim, Yong-Lak Choi, Yo-Seung Song, Deukyong Lee, Se-Jong Lee

Materials Letters, 57(2), 343-348 (2002)

Available, as full texs on RG, at: Influence of sputtering parameters on microstructure and morphology of TiO 2 thin films

- Effect of sputter deposition parameters on the characteristics of PZT ferroelectric thin films

Zhenxing Bi, Zhisheng Zhang and Panfeng Fan

Journal of Physics: Conference Series 61 ,115–119 (2007)

Available at: https://iopscience.iop.org/article/10.1088/1742-6596/61/1/024/pdf

- The Effect of Sputtering Parameters and Doping of Copper on Surface Free Energy and Magnetic Pr operties of Iron and Iron Nitride Nano Thin Films on Polymer Substrate

Waheed Khan, Qun Wang, Xin Jin, and Tangfeng Feng

Materials (Basel), 10(2): 217 (2017)

Available at: https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5459117/

…..and a previous similar RG question, available at:

https://www.researchgate.net/post/How-should-I-determine-the-various-parameters-for-DC-Magnetron-Sputtering

Good luck and my best regards, Pierluigi Traverso.

Pierluigi Traverso

Thank you so much dear Pr.

Abdelkader Bouazza What kind of parameters/process spec are you aiming for? If you give some specifics I may be able to give some guidance.

-Adam

@Adam Weidling

Dear Adam Weidling, thank you so much for your reply

I'm looking for experimantal magnetron sputtering process parameters (pressure, distance between target and substrate number of atoms injected inside the vacuum chamber, temperature....etc) and especially why choosen them with those values.

Abdelkader Bouazza I see, most times these parameters are chosen based on the end goal of the film. ie (desired crystal structure, surface roughness, density.. etc). I'd suggest looking at the Thornton Diagram (Thesis Tuning the thermal conductivity of polycrystalline films via...

Dear Dr. Bouazza,

as attachment I send you a presentation from W. Eckstein which you can also find in the internet. I think there are some answers on your questions.

Best

Günter Zschornack

@Günter Zschornack

Thnx à lot dear prof