I have prepared Ag thin film on quartz glass and ion beam mixed using MeV ion beam. For Rutherford back-scattering analysis can we use proton beam. What is the difference in using He and proton beam for RBS spectroscopy?
For 4 MeV Protons the scattering cross section will not any more be the Rutherford cross section, but influenced by the interferences of the incoming proton wave with the nuclear states. The analysis of the backscattering spectra will therefor be much more complicated.
For a thin film 4 MeV should be even too much. It depends on the elements you have. With oxygen the cross section is strongly non-Rutherford (even at 2 meV). For heavy elements you loose resolution (He+ is better). 4 MeV are indicated for high depth analyses.