Dear Kumar,

I think what you need is a textbook. this looks like a class work or thereabout. The field of nanoscience has really gone far and there are so many instrumentations available ranging from top-down to bottom-up approach. SEM, TEM and many others form part of the early candidates. Also, depending on what field of study, experimental techniques and machine needed for probes varies. For instance, this article which you can find at this link http://iopscience.iop.org/article/10.1088/0957-0233/17/3/S08/meta is talking about Probing systems for dimensional micro- and nano-metrology

I have also attached a text for your perusal, there are hundreds of thousands of textbooks out there.

Electron microscopy techniques were developed as early as the 50s but people didn't really talk about nanoscience. The development of the scanning probe technologies were arguably more influential, particularly the  demonstration that STM could be used not only to visualise but also manipulate on an atomic scale.

http://www-03.ibm.com/ibm/history/ibm100/us/en/icons/microscope/ 

This link from the tab above may be helpful for you:

https://www.researchgate.net/topic/Sustainable-Computing?ev=tp_pst_dtl_xkey

Best regards,

Debra