You can do it by using HCl (1:1 of HCl:H2O) with Zn (powder).  I was putting drops of acid solution on the area to be etched followed by sprinkle (with disposable plastic pipette) of Zn powder, wait for 15-45 seconds on seeing clear surface rinse with de-ionized water and you are done. We got very sharp edges and nice results by masking the patteren with tape first.

Mixing HCl and H2O2. Wait until bubbling, then put ITO into the solution for 1-3 second. Done. 

Dear researcher,

if you want to etch the ITO coated on Glass, the best way to do it is using HCl (6 N) with Zn (powder). we had great results.

Hi! Just sink your glass/ITO into HCl (2M) for ~1 minute. If you use concentrated HCl the ITO etching will be non uniform, because of the HCl vapors.

thanks for the answers but how we will mask the particular area

You can use a polyamide tape as pattern.

Indium tin oxide (ITO) thin films coated on glass can be etched with HCl (diluted ~1:1 v/v, concentrated acid/water) with either added FeCl3 (2─5% wt/wt) or mixed with HNO3 (i.e. aqua regia).

Can we use similar procedure for FTO glass as well, for etching with Zinc powder and HCl?

What is the role of HNO3 in ITO etching?

you can use Zn with HCl or pulse laser.

please check this link, (http://www.delta-technologies.com/downloads/applicationnotes.pdf?C=8)

1. Why not you do lithography before etching the specific regions of ITO? Provided, you have the suitable mask.

2. Alternatively, you can try with scotch tape to mask your specific portion. It works well. I have done that. Sometimes kapton tape too serves good for this purpose.

3. For etching ITO, take a cotton swab, dip at one of its sides in Conc. HCl and give a little touch in Zn dust. Finally, wipe along the regions where you wanna to etch ITO (regions where no scotch tape is there).

You can do it by using HCl (1:1 of HCl:H2O) with Zn (powder).  I was putting drops of acid solution on the area to be etched followed by sprinkle (with disposable plastic pipette) of Zn powder, wait for 15-45 seconds on seeing clear surface rinse with de-ionized water and you are done. We got very sharp edges and nice results by masking the patteren with tape first.

thanks sir

We successfully demonstrated a room temperature controlled etch rate of ultrathin TO using HCl: HNO3:H2O (1:1:5).

Hello. As I understand almost everyone use Zn powder... Can I remove ITO coating from glass surface without Zn powder ?

Laser patterning is a quite important process for ITO etching, we call it selective etching,which could remove the ITO completely but remain the glass/PET substrate no hurt, we launch such process in mass production for touch panel manufacturing

Please. What´s ITO Etching?

Revoming ITO coating as designed patterns, normally it is glass or PET substrate

David Kao I would like to ask you about the type of target for laser to do this kind of etching ?!

Thanking you very much