I have some thin ceramics that I would like to etch some features (introduce a notch for fracture toughness in microscale tests), but I haven't been able to find any information on these materials as they are not typically microfabricated materials. Has anyone done something similar to this or know of a gas and/or process that would etch these materials with RIE? Is it possible to etch ceramic materials with ionic bombardment (in sort of reverse sputtering)? If so, would the process be too slow?