Yes, one may use spray coating. Search "spray coating and electron beam lithography" or "electron beam lithography over topography" together. You will find a number of papers from the recent years.
I can assume that the considerations for spray coating are quite different and thickness of resist, uniformity, coverage over topography, etc., are matters of concern.
Hi Hadar Genish.. i'm also facing the same problem to spin coat small sample..my sample size is 2mmx3mm. currently i attached the sample on the dummy substrate using photoresist. however, it didnt give smooth surface especially at the edges. can you share how you spin coat the sample?
Dear Aliza.
I end up using samples that were big enough...
However, I tried few methods including the dummy substrate (which didn't work out so well for me) The best method I used was something like spray coating but with micrometer droplets. your best option is to get one of these http://www.sono-tek.com/photoresist-spray-equipment/ but you can also generate such droplets from your diluted resist solution using a house hold ultrasonic humidifier (~20$ here in Israel). you can then place your sample at the output of the device to collect the mist. I tried to make some PVA coatings with that and it turned out OK. Im not sure, however, what is the minimum thickness you can get with this method but if you need something with thickness on a um scale than it has no limitations regarding the sample size. it will also take some time calibrating this method and you should use very diluted solution as well as avoid rapid evaporation of the solvent (rapid evaporation makes the film rough).
my suggestion is try this only if you have no other way :)
good luck! and if you find a working method please share with me!
- Badges
- Science topic
- Similar topics
- Geoscience
- Asia
- India