Does anyone have experience etching SiO2 using a hard metal mask?

Ahmed Shadman Alam @Ahmed-Shadman-Alam-2

16 January 2025 0 2K Report

I have used around 0.3um of Nickel but that thickness is still not enough, and I am trying to etch 15um of SiO2 and around 80um of Si. The mask barely holds up and going thicker makes the lift-off harder or peels off the metal mask. Any suggestion?

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