hallo every one,

I know that the hardness of a substance means how strongly it can resist against penetration of a harder substance and the E means after the release of a stress the material will return to the initial shape.

Now, for example, by nanoindentation it was found that the hardness of a photoresist is 0.3GPa and its E modulus = 6GPa. Does it means that the fotoresist under 6GPa it will not plastically deform and from 0.3GPa will penetrate a harder material in the Fotoresist or how can we decribe that??

thank you very much!!

best regards

Chiko

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