A gaseous mixture of a titanium tetrachloride , hydrogen and oxygen containing a excess of hydrogen is passed over a heated substrate to a temperature range below 600*C. The formation of titanium dioxide on the surface of the substrate occurs.

Did you need a method or a chemical equation? How do you want the state of powder, i.e. film or powder?

CVD usually involves vaporization the metal (Ti) in a vacuum (chamber or tube furnace) as a first stage then annealing it atmosphere or under water vapor in a certain temperature and time. You can make different procedure to do that.

I hope this help.

Dear ميسم شهاب, please refer to the following documents, and if possible which type of TiO2 you want to prepare. My Regards

https://doi.org/10.4028/www.scientific.net/AMM.773-774.744

https://doi.org/10.1016/0927-0248(92)90051-P

https://doi.org/10.1016/j.jhazmat.2008.01.040

10.1116/1.579173

https://doi.org/10.1021/ja984446f

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6215187/