Dear friend,
I have a problem regarding the displacement beam of the cantilever. I simulation the cantilever based on the capacitance method in the Comsol by this feature.
the material of beam cantilever is silicon and I use Si02 for dielectric for this cantilever and the platinum is used as gound.
I determine a range of voltages from 2V until 12V with the space between silicon and ground from 20 [um] until 40[um].
the dimension of silicon is 1000[um]*200[um]*20[um].
unfortunately, my result is not good because my cantilever doesn't have a displacement for this simulation.
one of the figures shows that total displacement with space (hsi) between cantilever and ground.
Could you help me please to solve this problem? and I attach my Comsol file here.
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