Hi Ritika,

It would be better if you purchase the commercially available DEZ and used it as it is. I have long experience using DEZ as the Zn source to deposit ZnO by ALD; it is very difficult to synthesize it in high-purity form and without high purity, you won't be able to deposit ZnO via the PECVD method.

Regards,

Dipayan

Thankyou Dipyan

The vendors I am contacting are not aware of diethyl zinc hence they are asking for the composition of the gas. Is there anywhere we can know that?

Ritika Tripathi You can contact Mr. Sundeep from Chempure (Email id: [email protected]; Mob: +91 9538862813) and you may mention my name as a reference. He knows me very well and you ask the query about the Diethyl zinc chemical used for ALD/PECVD. And for optimizing the ZnO growth process, you can contact me if you have any doubts.

Best regards,

Dipayan

Thank you Sir.

I will surely be connected. It was great help