Cold Sputtering in PVD Process?

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Dmitry Yakovlev

In our latest article, we talk about a new method of cold-walled PVD. The application of induction heaters allows the heating of only the holder while the walls of the reactor remain cold. Such a design has advantages such as reduced precipitation of contaminants on the reactor walls, low energy consumption, and low probability of gas-phase reactions.

Enjoy!

Article Physical Vapor Deposition Features of Ultrathin Nanocrystals...

K. Sreenivas

Cold sputtering means you can sputter deposit under cold conditions, for example deposit on simple plastic substrate without damaging the substrate, and avoiding any kind of electron bombardment on the substrate.

Sabariah Mat Said

Hi all, thanks for your answer.