We have deposited 2 microns metallic thin films on graphite using physical vapor deposition. Then we irradiated those samples at different irradiation doses (by varying ion energy and fluence). Micropores are reported in various similar studies. We also want to analyze those micropores using cross-sectional images in a scanning electron microscope. Will this method work? or I can make any modification using an etching agent to enhance my result? Any suggestion or literature recommendation will be appreciated.

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