I want to extract the lattice temperature 3Dheatmap data as a function of coordinates (X, Y,Z) for a 3D finFET Model. I can see the 3Dheat map in the .tdr file but Unfortunately, could not find a suitable way to accurately extract the data in .csv format.Can someone please tell me the way? Thank You in advance.#TCAD#Sentaurus#3Dheatmap#Latticetemperature# #data