I am working on a SU-8 3025 (Cyclopentanone as solvent) to realize deep, narrow and long trenches on the surface. The development step is a total failure! I am using PGMEA as developer and after 8 minutes of immersion the dissolution is only partial.
Armando Dito
Thank you very much for your advice.
GBL, Cyclopentanone and PGMEA...what is their difference in anisotropic diffusion speed?
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Michael W. Toepke
I have developed fairly thick SU8 films in the past (i.e., 250 µm) using PGMEA with stirring and it would take ~30 minutes to develop completely. Frieder's suggestion to replace the solvent is a good idea. Depending on your geometry and photolithography step, overexposure can cause problems with the development of thick films.
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