I want to synthesis ZnO layer with high carrier concentration of around 10^21 cm-3 with Solgel technique. Can some one share any research paper on this topic?
Vishal Kaushik Synthesis using aqueous sol-gel techniques have worked well for me. If you want higher concentrations of carriers you could also use IZO or In2O3 mixtures. The larger principle quantum number on In will certainly increase the free carriers.
Typically, ZnO thin films exhibit carrier concentrations that vary between 1017 - 1018 [cm-3] [1,2]. However, the carrier concentration can be considerably increased by Al-doping (the most extended method) in sol-gel processes, which enables it to reach a concentration range of 1019 - 1020 [cm-3] [3-6].
As mentioned by Adam Weidling, high carrier concentrations (≈ 3 x 1020 [cm-3]) can be also achieved by using In2O3-ZnO mixtures in sol-gel processes [7]. Similar concentrations (≈ 4 x 1020 [cm-3]) have been reported for F/Sn co-doping [8], Y-doping [9] and In-doping [10] in sol-gel processes.
I could not find any work that reports carrier concentrations in the order of 1021 [cm-3]. Most of the research report concentrations up to 1020 [cm-3] for the best cases. It seems that achieving concentrations as high as 1021 [cm-3] is a very difficult task. However, it does not mean it is impossible.
I recommend you carefully read the papers I attached and formulate your own synthesis receipts following the main hints that any paper can provide you. I feel you will have to carry out this scientific process (scientific method) to look for the optimum synthesis conditions to reach your desire carrier concentration.
Good luck!
Kind regards,
Simón Roa.
[1] Article ZnO: Growth, doping & processing
[2] Article Effect of thermal annealing treatment on structural, electri...
[3] Article Al-doped ZnO thin films by sol-gel method
[4] Article Sol–gel synthesis of intrinsic and aluminum-doped zinc oxide...
[5] Article Preparation and characterization of Al doped ZnO thin films ...
[6] Article Formation of Al-doped ZnO thin films on glass by sol–gel pro...
[7] Article Electrical and Optical Properties of In2O3–ZnO Thin Films Pr...
[8] Article Properties of fluorine and tin co-doped ZnO thin films depos...
[9] Article Structural, morphological characteristics and optical proper...
[10] Article Microstructures, optical and electrical properties of In-dop...