Hello, Try this: Micro and Nano Technologies in Bioanalysis (James Weifu Lee and Robert S. Foote)

G. S. May, S. M. Sze: “Fundamentals of Semiconductor Fabrication”, Wiley, 2003. ISBN: 0-471-23279-3

M. Gad-el-Hak: “MEMS Design and Fabrication”, CRC Press, 2006. ISBN: 978-0-8493-9138-5

For bio: Saliterman, Fundamentals of BioMEMS and Medical Microdevices

"Introduction to BioMEMS" by Albert Folch is pretty good for biological applications.

Try this, its a good handbook especially for nanobiomaterials. I have attached the intro chapter here if you are interested. 

Chapter Nanobiomaterials Handbook, Chapter 1: Nanobiomaterials: Curr...

Hello Joung-Hyun,

Further to the other good suggestions, one of my favourites for a quick overview is 'Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices' by Richard C. Jaeger.  ISBN-13: 978-0201444940. It is part of a series of books which are all very good.

A fantastic free resource is 'A (not so) short introduction to MEMS' by Franck Chollet and Hoaxing Liu.

http://memscyclopedia.org/introMEMS.html

I have attached it - hopefully it is useful.

Kindest regards,

Jules