Again hello..

By the way, i am using 180 nm process ..

Can somebody help me ?

Thanks

I am not familiar with TMSC-specific values, but the general technologies numbers are available. For an instance, interesting data about current and future nodes can be found in the last page here: http://www.itrs.net/Links/2013ITRS/2013Chapters/2013ExecutiveSummary.pdf

ITRS is a good resource for such information.

Since you are referring to an old technology, I believe you can find the values you are looking for (again, not TSMC-specific) in review papers such as H. Iwai's (doi:10.1016/j.mee.2009.03.129). This specific paper doesn't have the numbers you're looking for but it's a starting point.

Thanks Lior Kornblum