Can anybody give solution of fabrication method for z axis capacitive accelerometer where proof mass is between upper and bottom fixed electrodes? There is a file attached.
Might the following link satisfy your needs ?
https://www.researchgate.net/publication/272532628_Fabrication_of_a_MEMS_capacitive_accelerometer_with_symmetrical_double-sided_serpentine_beam-mass_structure
Partial document:
http://link.springer.com/article/10.1007/s00542-013-1911-z
Article Fabrication of a MEMS capacitive accelerometer with symmetri...
maybe i can help you but need more explanation what you want exactly!
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