Best software for generating patterns?

11 November 2014 1 6K Report

I was wondering if anyone could help with the best software to design a pattern for MEMs fabrication. I need 10 - 20 microns channel width with a pitch of 10 - 20 microns

Benoit Charlot

I guess you are talking of layout for lithographic mask?

Cadence Virtuoso is the best layout tool but you can try Layout Editor that has a free version where you can build such an array with cells and instances

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