Hi!

I am trying to etch Titanium dioxide 100-400nm diameter and 700 nm tall, Smooth and vertical sidewalls are important, does anyone have a starting recipe I can try?

The following gases are available in my RIE and ICP, CH4, CF4, CHF3, Cl2, SF6, BCl3, O2, H2 and Ar.

Thanks,

Yuhao

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