Uma Muthiah

2 Questions 4 Answers 0 Followers

Questions related from Uma Muthiah

How can I get Selectivity of 1: 1 and Anisotropy of 1 using RIE ?

I am currently working on a project "Transfering 3D structure to silicon using RIE machine" from oxford. So I was wondering if someone could help me with the recipe, to obtain Selectivity of 1:1...

09 October 2016 2,599 3 View

How to overcome the reflow of positive photoresist AZ4562?

I'm having some problem with the hard bake of the resist and I wonder if someone could help me with that. Initially I make the adhesive coating followed by prebake and the resist coating with the...

01 January 1970 6,856 6 View