Travis Yeow

2 Questions 1 Answers 0 Followers

Questions related from Travis Yeow

Spatial ALD - Precursors forming powder on reactor head instead of substrate?

I am trying to deposit WO3 films on a glass substrate. My precursor is BTBMW and H2O. The tungsten precursor is vaporized in a nebulizer. For some reason, a powder/film is forming on my...

10 November 2018 8,486 3 View

Is an electrode needed for plasma cleaning?

I have a twin magnetron sputtering system and am looking to upgrade my system to include substrate cleaning and biasing. I have a DC pulsed power supply to apply a bias voltage to my substrate...

14 July 2016 391 3 View