Travis Yeow

3 Questions 2 Answers 0 Followers

Questions related from Travis Yeow

Spatial ALD - Precursors forming powder on reactor head instead of substrate?

I am trying to deposit WO3 films on a glass substrate. My precursor is BTBMW and H2O. The tungsten precursor is vaporized in a nebulizer. For some reason, a powder/film is forming on my...

10 November 2018 8,549 3 View

Is an electrode needed for plasma cleaning?

I have a twin magnetron sputtering system and am looking to upgrade my system to include substrate cleaning and biasing. I have a DC pulsed power supply to apply a bias voltage to my substrate...

14 July 2016 438 3 View

I have a MFC (Mass Flow Controller) calibrated to 20sccm from MKS. (Model 1179A) Is there a way to increase this range to 200? 500?

Need a higher flow rate for twin magnetron sputtering

15 June 2016 2,467 2 View