Oktay Yarimaga

2 Questions 3 Answers 0 Followers

Questions related from Oktay Yarimaga

Any suggestion on post aluminum metal etch cleaning especially for submicron metal patterns on PECVD oxide layer?

Hi all, Do you have any strategy to clean the aluminum etch residues on PECVD oxide layer? There is also a ARC TiN layer on Al. The etch gases are Cl2 and HBr. O2 plasma is applied right after...

09 September 2015 5,982 2 View

Would phosphoric acid cause damage to Si epitaxial layer?

I am trying to remove LPCVD nitride from Si epitaxial layer using hot (150C) phosphoric acid. Anyone has experience whether the hot acid solution induces any damage on the epitaxial layer?

02 February 2015 7,643 2 View