Jiabin Wang

2 Questions 6 Answers 0 Followers

Questions related from Jiabin Wang

How does the Rapid Thermal Processing (RTP) affect the IGZO thin film transistors?

As far as I know, annealing is good for IGZO TFT performance. I used Rapid Thermal Processing (RTP) to anneal IGZO TFT at 450℃ for 30 seconds. However, after RTP annealing, the IGZO is metal-like,...

04 April 2017 5,278 0 View

How to etch HfO2 film without hurting the TiN that underneath the HfO2 film?

I am trying to fabricate a TFT with back gate structure. After depositing and patterning TiN back gate structure, a HfO2 film was deposited by ALD. The next step is etching the HfO2 and patterning...

01 January 1970 5,753 7 View