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I deposited a very thin(~2nm) TiO2 film on Si substrate by magnetron sputtering. After that i did XPS of this film at room temperature and got following spectra. Can anyone know why an extra peak...
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I deposited TiO2 thin film on Si substrate from a TiO2 oxide target using rf magnetron sputtering technique (only Ar plasma is used ). Can i expect individual Ti and O2 atoms are sputtered from...
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