Will there be any pattern shift of the mask while using Phase shifting masks in Optical Lithography processes?

Soumalya Mukherjee @Soumalya-Mukherjee-2

25 September 2015 1 7K Report

We are using a transparent block of glass having a width to cause a destructive interference at the confluence of the two diffracted wavelets coming from the consecutive mask slits. Will there be any shift in the pattern while we use such masks? Again, will the same problem persists if we use Immersion Lithography? (pattern shifting due to refraction)

Oleg Nizhnik

For refraction to occur, the poynting vector must be slanted which is not the case for typical lithography light sources.

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