Could you recommend to me some valve for the gas injection into low pressure plasma reactor? Normally I was using good old needle valve, but unfortunately it became too old. I am using precursors such as cyclopropylamine or maleic anhydride which are corrosive as most of amine precursors. Of course the valve can be cleaned and repaired from time to time but not after each experiment. 

Maybe somebody was trying to use diaphragm valves for amine precursors? Please share your experience

https://www.pfeiffer-vacuum.com/en/products/valves/diaphragm-valves/?detailPdoId=7607

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