Dr Tuhmaz,

It goes to wherever your vacuum pump exhausts to.

In most cases, that is the atmosphere (via an oil mist-trap: if on a rotary 'roughing' pump). Simply follow the line from the last pump's exhaust.

Ah: a sputtering chamber - well, that's a relatively poor vacuum (depending on the size of that chamber - but in any case the argon probably vents to the laboratory via a filter or two. It would be hard, but not impossible, to sequester it.

Thanks lot... May i know what is the function of the shutter?

What does shutter do?

'Afternoon Dr Tuhmaz,

In a sputtering chamber you usually want to be able to control the exposure that the item-to-be-coated has, to the beam of hot vapour.

Without knowing the details of your system, I imagine that there's a mechanical shutter - which can be electrically actuated to block off the object being coated from the beam of hot vapour.

Good morning Dr.Garry,

Thanks alot... may the shutter used to homogenize the nano particles on various substrate?