Common MEMS actuators move within the electrode inter-space due to the pull-in effect. We have developed a new type of actuators that can move much more. The in-plane or out-of-plane actuator travel range can be much larger than the electrode separation.
Which MEMS-based device or application would you realize with such kind of actuator?
http://www.nature.com/ncomms/2015/151211/ncomms10078/full/ncomms10078.html
1) Actuator for mirrors - for optical projector, laser, microwave antennas.
2) Speaker, laringophone, ultrasonic transmitter (possible saser if there is coherent movement)
3) Cavitation oscillator for cleaning of liquids tanks, printer jets
4) Vibro accelerator for chemical reaction
5) Massage device, ultrasonic cavitation cosmetics
6) Microvalve
7) Micro peristaltic pump
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