What kind of etchant could be used to etch Ge and MgF2 without etching CaF2?

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Carlos Araújo Queiroz

For selective etching of germanium with regards to calcium fluoride (CaF2), I would suggest 'Billig's etch': K3[Fe(CN)6] (12 g) + KOH (8 g) + H2O (100 ml H2O).

I suggest conc. nitric acid for selective etching of magnesium fluoride (MgF2) with regards to calcium fluoride (CaF2).

Chandra prakash Goyal

Can you please suggest chemical for selective etchant for Poly and Single crystalline SiGe wafer with respect to Si?