Moisture may be absorbed in your thin films which may increase dielectric constant and loss both. Water has large value of dielectric constant, around 80, and also conducting so as to increase the D.c conduction loss. You can anneal your film at around 200 degree centigrate in vacuum. Hopefully, moisture will be removed and then you can measure dielectric parameters again but in vacuum this time. You may find decreased values now. Try. Good luck
Yes it will. for better understanding you can buy a commercialized capacitive humidity sensor(300/400 rs) connect it with arduino microcontroller and measure the changes in VI characteristics with variation in humidity. Hope it will help.