I favor to use less 1% as a maximum load ed, because the very high value of doped is caused high defect, random properties and low efficiency of nano compound in any reaction.
Thanks Mr. Luma , yeah there is lots of defects created, its like intrinsic channel. In many of the papers 10^19 doping is done for a channel length of 10 nm and radius 2nm. Is this even possible.
what is the limit of this doping, it should have been below 10^10.
You can work out from the volume (10nm* pi* (2nm)^2=1.2*10^-25 m^3) relative to the atom density (Si: 5*10^28 atoms per m^3) that there are only ~6000 atoms in total, so a SINGLE dopant atom would already mean a doping level of 1/6000=170ppm=8*10^24 m^3 or ~10^19 cm^-3. I don't think this is technologically reproducible.