When you are observing the RHEED pattern due to passing of electron beam through the grown nanostructures (or thin film), its analysis is similar as the transmission electron diffraction in transmission electron microscope.
The distance of diffraction spots on the screen of any characteristic plane from the directly transmitted (000) spot, depends on the inter-planner spacing, wavelength, distance between specimen and screen. So you have to calibrate these parameters with the help of known samples.
Thereafter, for indexing to find out the crystallographic orientation, you can follow this paper.
Article Growth of Ag nanostructures on high-index Si (5 5 12) surfac...