Most PVD fabricated multilayers with nanoscale layer thickness have microstructures like columnar boundaries, so that the cross-sectional textures are always like what is shown in the attached figure. The columnar boundaries are always perpendicular to the layers and seems to be distributed periodically in the microstructures. This feature is detrimental to the mechanical performance, since it is weakly bonded. Does anyone know the formation mechanism of the columnar boundary in PVD multilayers? and How to modulate or eliminate it by changing the PVD conditions?

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