Hi everybody, please, can someone tell us if the transition metals (W, Fe, Ni, etc ...) in silicon destined for solar cell manufacturing can be detected by ED-XRF technique. Note that the concentration of these metals in silicon (with a density of 5E22 cm-3) does not exceed an average value of 1E15 cm-3.
Dear Nabil Khelifati
welcome!
In the paper at the link:https://www.osti.gov/etdeweb/servlets/purl/20024919, you can fine the detection limit for some elements including the ones which you mentioned in your question. The detection limit is given by microgram/cm^2 of the sample. You van calculate the concentration of your elements per cm^3
As far as I know such atom concentrations can be measured by deep level transient spectroscopy.
Best wishes
Dear Nabil Khelifati
welcome!
In the paper at the link:https://www.osti.gov/etdeweb/servlets/purl/20024919, you can fine the detection limit for some elements including the ones which you mentioned in your question. The detection limit is given by microgram/cm^2 of the sample. You van calculate the concentration of your elements per cm^3
As far as I know such atom concentrations can be measured by deep level transient spectroscopy.
Best wishes
Dear Nabil Khelifati thanky you for this interesting question. Please see this highly recommended article entitled
The Limit of Transition Metal Detection on Silicon Wafers
https://www.balazs.com/sites/default/files/2018-11/PUB0008%20%20Ft16-09-2%20Future%20Fab%20DL%20Transition%20Metals%200502.pdf
Dear Abdelhalim abdelnaby Zekry , thank you for your response and thanks also for the paper.
Best regards.
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