Spatial resolution is governed by the penetration and spreading of the electron beam in the specimen. Since the electrons penetrate an approximately constant mass, spatial resolution is a function of density. In the case of silicates (density about 3 g cm-3 ), the nominal resolution is about 2 µm under typical conditions, but for quantitative analysis a minimum grain size of several micrometers is desirable
I you explain your problem in a bit more detail, it will be easier to answer your question.
Is your film of interest coated with something else, so that you need to see under this layer of "something else"?
EDIT: Did not paid attention before that you are from NCSU. You have pretty strong Analytical facility, you can discuss your problem face to face with a professional.