the basic definition of CVD  process is "in which thermal decomposition of a hydrocarbon vapor is achieved in the presence of a metal catalyst'. it is also known as thermal CVD or catalytic CVD. it means that a good variety of  hydrocarbons and catalysts are used in this process. 

you can find a good review as given link below

Journal of Nanoscience and Nanotechnology Vol. 10, 3739–3758, 2010

Although Shama's answer matches most cases, actually neither is a catalyst necessarily involved, nor are hydrocarbons the only possible gases that can be used for the deposition.

Dear Venkatathri;

following are interesting references if you want to go deeper in the subject. If you need other books please feel free to let me know. Regards

If you are simply asking what chemical vapor deposition methods are used to prepare nanomaterials, there are numerous options - among them ALD (Atomic Layer Deposition, sometimes called Atomic Layer CVD) which is one of the methods that are the most highly focused on nanomaterials.

However, if you are asking for the name of the method you are using in your specific example I would agree with Shama Parveens answer above that "catalytic CVD" is the most descriptive name for your method.

chemical vapor deposition ,it like CVd or PECVD  ; it' s introduce the chemical material as a gas and using a  plasma  flux to deposite ON SUBSTRATE 

sending chemicals ( precursors) in gas phase(vapor) and depositing them on substrate (due to high temperature action )