The effect of varying concentration and spin speed on the thickness of spin-coated PMMA was discussed (for silicon wafers) at: D.B. Hall, P. Underhill, J.M. Torkelson, "Spin coating of thin and ultrathin polymer films", Polymer Engineering and Science, 38(12) 1998, 2039-2045:
Thank you very much. I have already read the first one and I wanted to re-check and to see if another solvent besides toluene has been proved more effective .
I had bad experiences with fast evaporating solvents (low boiling point) for spincoating (rippling structures in spincoated film occurs). For me 2-ethoxy-ethylacetate gives good films (but there is some residual solvent in the spincoated film depending on film thickness > 1000nm which is removed by heating the wafer to about 120°C).