What is the best (easy to use) software for physical layout of optical lithography processes?

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Julien Madéo

If you want to draw the design for a mask used for optical lithography. You can use Klayout which is a free software and easy to use.

Krishnakumar Chullipalliyalil

Inkscape, may be ? Its free and easy to use (even some functions will be as easy as using paint). User friendly GUI and produces good enough graphics.