What is the average thickness of native oxide on Si wafer after Pirahna Etching solution ?

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Dipayan Pal

Harsh Chaliyawala

The average thickness of native oxide on Si wafer after Pirahna Etching solution is ~ 5-6 Angstrom.

Please see the attached paper (Table III, highlighted portion).

Best Regards

Dipayan

Thank you so much for this article.

Manuel Schnabel

In my experiments piranha doesn't change the thickness of a surface oxide. So its thickness will be whatever it was before piranha.

Thank you so much Dr. Manuel.