What is the aluminum etch rate in 37% HCl solution at room temperature?

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Jerome Polesel

You can find this kind of information in the big CRC handbook of metal etchants.

Link: http://vector.umd.edu/links_files/Handbook%20of%20Metal%20Etchants.pdf

Else, you can catalyze and accelerate the etching reaction of Aluminum by adding copper sulfate with HCl (Caution: the reaction is highly exothermic).

Kind Regards.

Eylem Durgun Özben

Hi Jerome,

thank you for the answer and the nice source! I will check it immediately.

Regards

Erik Strub

Probably difficult to get a reproducible value for sputtered Al, because it will depend on the surface (roughness/purity) of the layer.