What are the possible solutions for mobility degradation (RCS, RPS) in GS high-k/metal gate?

26 May 2015 1 6K Report

In current Technology, we use the Gate-stack (GS) High-k/Metal gate. The problem of GS High-k/Metal gate is mobility degradation is mainly due to Remote coulomb scattering (RCS), Remote Phonon Scattering (RPS). Suggest me to enhance the mobility.

Narendar Vadthiya

Thank you so much Ariadne Tsambani.

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